Method for directly heating metal membrane to grow oxide nanowires in array-type arranged microcavity structure, and application thereof

The invention discloses a method for directly heating a metal membrane to grow oxide nanowires in an array-type arranged microcavity structure, and the application thereof. The oxide nanowires which are vertical or approximately vertical to the surface of a substrate without being contacted with a cavity wall can grow in each microcavity. The method is carried out according to the following steps:firstly, sequentially preparing a plurality of transitional layers, metal membranes and protective layers on the substrate; then, adopting a photoetching method to selectively expose metal membrane surfaces; and finally, heating the surfaces by positioning the surfaces in an oxygen-containing atmosphere so as to realize the growth of the oxide nanowires. The method has simple process, is easy torealize, does not need the use of catalyst and can avoid the pollution caused by the catalyst. The structure is favorable for the electricity application or electric field contact respectively at thetop ends of the oxide nanowires and on the substrate on which the oxide nanowires exist, therefore, each microcavity can be selectively controlled and then the structure can be used for preparing devices such as vacuum micronanoelectronic source array and the like. The invention exemplifies copper oxide nanowires growing in the array of the microcavity structure and puts forward an embodiment on arelevant property test.