Formation of rocking curves for quasi‐forbidden reflections in short‐periodic superlattices GaAs/AlGaAs

Peculiarities of the diffraction patterns in short-periodic GaAlAs/GaAs superlattices were investigated in the case of quasi-forbidden reflections. The weak influence of GaAs layers on the diffraction pattern intensity, associated with a small value of an atomic form-factor difference as well as the appearance of periodic satellites, has been established. The reasons for the appearance and disappearance of the satellite structure in the diffraction patterns are discussed in relation to the structural perfection of the layers, interfacial strain and roughness of the boundaries, and layer thickness fluctuation.