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Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum
Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum
2021
Heon-Yul Ryu
Lieve Teugels
Katia Devriendt
Herbert Struyf
Tae Gon Kim
Jin-Goo Park
Keywords:
Chemical engineering
Materials science
Molybdenum
Chemical-mechanical planarization
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