Polysilicon reducing furnace chassis with three centrosymmetric spiral flow guide channels
2009
The utility model provides a polysilicon reducing furnace chassis connected with three centrosymmetric spiral flow guide channels in parallel. The chassis comprises a chassis flange, a sealing bush ring, a lower bottom plate, an upper bottom plate, a mixed gas inlet short section, a mixed gas outlet, a cooling water outlet, a cooling water inlet, an electrode holder, a first series of flow guide plate, a second series of flow guide plate, a third series of flow guide plate, a side wall cooling water inlet and a side wall cooling water outlet. The first series of flow guide plate, the second series of flow guide plate and the third series of flow guide plate separate out a first spiral flow guide channel inner end, a second spiral flow guide channel and a third spiral flow guide channel that are totally the same in a closed cavity body consisting of the chassis flange, the lower bottom plate and the upper bottom plate. The structure of the three centrosymmetric spiral flow guide channels enhances cooling effect, reduces metal temperature difference on the chassis and prevents the chassis from deforming.
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