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Investigation of the defect structures in CZ silicon crystals annealed in either oxygen or nitrogen atmosphere
Investigation of the defect structures in CZ silicon crystals annealed in either oxygen or nitrogen atmosphere
2018
C. Frigeri
Minya Ma
T. Irisawa
Tomoya Ogawa
Keywords:
Nitrogen
Atmosphere
Radiochemistry
Oxygen
Annealing (metallurgy)
Crystal
Materials science
Silicon
Analytical chemistry
cz silicon
nitrogen atmosphere
Correction
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