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Direct-write Focused Ion Beam Lithography
Direct-write Focused Ion Beam Lithography
2010
A Joshi-Imre
Leonidas E. Ocola
J Klingfus
Keywords:
Analytical chemistry
Ion beam
Stencil lithography
Lithography
Focused ion beam
Materials science
Optoelectronics
Metallurgy
focused ion beam lithography
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