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Effect of Abrasive Concentration on Chemical Mechanical Polishing of Sapphire
Effect of Abrasive Concentration on Chemical Mechanical Polishing of Sapphire
2015
yanweixia
Zefang Zhang
Xiaohui Guo
Weili Liu
Zhitang Song
Keywords:
Abrasive
Chemical-mechanical planarization
Sapphire
Metallurgy
Materials science
Correction
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