Passive Cooling of a Micromechanical Oscillator with a Resonant Electric Circuit

We cool the fundamental mode of a miniature cantilever by capacitively coupling it to a driven rf resonant circuit. Cooling results from the rf capacitive force, which is phase shifted relative to the cantilever motion. We demonstrate the technique by cooling a 7 kHz cantilever from room temperature to 45 K, obtaining reasonable agreement with a model for the cooling, damping, and frequency shift. Extending the method to higher frequencies in a cryogenic system could enable ground state cooling and may prove simpler than related optical experiments in a low temperature apparatus.