Wide Dynamic Range Low Light Level CMOS Image Sensor

This paper describes a CMOS image sensor technology suitable for the next generation of scientific cameras. We describe a prototype sensor with 320x240 pixels based on this technology. The sensor features 8 different types of 5T pixels with pinned photodiodes. All of the pixels have a 6.5um pitch and include an integrated micro-lens. The measured peak quantum efficiency of the sensor is greater than 50% at 550nm, and the read noise is less than 1e- RMS at room temperature. The linear full well capacity is greater than 40ke-, the dark current is less than 3.8pA/cm 2 at 20°C, and the MTF at 77 lp/mm is 0.4 at 600nm. The sensor also achieves an intra-scene linear dynamic range of greater than 92dB (40000:1) at room temperature.