And a polishing pad having a window of the support system
2009
一种研磨系统,所述研磨系统包含具有固态光传输窗口的研磨垫、具有端部的光纤以及具有贯穿的垂直穿孔的间隔件。 该间隔件的底表面接触该光纤的端部,该间隔件的顶表面接触该窗口的下侧,而该垂直穿孔对准该光纤。
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