Production apparatus and a method for manufacturing a mold drum

2011 
The present invention can be suppressed while the drum is rotated in the mold rotation axis direction due to the yaw of the drawing pattern becomes unclear situation while suppressing increase in cost. To achieve this object, the cylinder mold making apparatus (1) comprising: an electron beam irradiation device (2); a mask (3), the mask having an opening portion through a portion of the electron beam, to form a resist while the multi-beam electron beam lithography; and the drum mold (100) about the axis of rotation of the rotary drive means (4); rotation (8) direction to the rotation shaft of the drum mold (100) in the yaw displacement amount detecting displacement amount detection sensor (5); control means (6); and an actuator (7), the actuator (7) according to a control signal from the control means (6) of the electron beam drawing position of the drum mold (100 ) displacement of the follower (8) in the direction of the rotation shaft to suppress the exposure position deviation resist rotation of the drum mold (100) (8) in the rotation axis direction of displacement caused by deflection.
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