Rare earth doped silica waveguides on Si fabricated by flame hydrolysis deposition and aerosol doping

High silica waveguides on Si fabricated by flame hydrolysis deposition were doped with rate earth ions using an aerosol doping technique. Rare earth doping levels in the glass were dependent on the nebulized solution strength and the delivery rate of the aerosol to the burner, giving the possibility of selective area doping.