Production of silicon carbide powder from vaporized polysiloxane

PURPOSE: To provide the production method of the powder suitable for producing a silicon carbide ceramic, low in aggregation, high in purity and fine with a simple process and good cost effectiveness. CONSTITUTION: In the production method of the silicon carbide powder in a single heating step, the step in which the vaporized polysiloxane is introduced to a reaction chamber, and the polysiloxane vapor is heated at ≥1,600°C for 0.01 sec-30 min in the reaction chamber to form the silicon carbide powder and the silicon carbide powder is captured in included. The polysiloxane preferably includes (a) cyclic polysiloxane expressed by the formula: (R 2 SiO) n (wherein, each R is independently hydrogen atom or a 1-6C hydrocarbon group; and (n) is an integer of 3-8) or (b) linear polysiloxane of R 3 Si-O-(R 2 SiO) n -SiR 3 (wherein, each R is independently hydrogen atom or a 1-6C hydrocarbon group and (n) is the integer of 0-8). COPYRIGHT: (C)1995,JPO