Transferable Internal Reservoir Device for Electron and Ion Beam Induced Chemistry

Focused particle beam induced chemistries have proven useful for high-resolution, high-accuracy, high-precision nanofabrication. The ability to selectively deposit and etch materials makes the technique viable for X-ray and photomask fabrication and repair, integrated circuit repair and rewiring, cross-sectional SEM and TEM sample preparation as well as fabrication of nanomechanical tools. Here we present the development and implementation of a simple, self-contained precursor flux generator (PFG) transferable to a number of SEM and FIB systems enabling the study of beam induced chemistries at moderate cost. A comparison of the deposition rate for electron beam and FIB induced deposition using such a system developed in our laboratory with a phenanthrene (C