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A Manufacturable HDP Oxide Filled STI Process with SiN Liner for the Deep Sub-Micron Inter-Well Isolation
A Manufacturable HDP Oxide Filled STI Process with SiN Liner for the Deep Sub-Micron Inter-Well Isolation
1998
H. S. Lee
S. J. Kim
T. Park
J. H. Choi
K.-W. Park
B. K. Hwang
Y. G. Shin
H. K. Kang
Z. Li
Y. Lee
F. Moghadam.
Keywords:
Micrometre
Oxide
Nanotechnology
Materials science
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