FTIR (Fourier Transform Infrared) spectrophotometry for thin film monitors: Computer and equipment integration for enhanced capabilities

Fourier transform infrared spectrophotometry (FTIR) is a valuable technique for monitoring thin films used in semiconductor device manufacture. Determinations of the constituent contents in borophosphosilicate (BPSG), phosphosilicate (PSG), silicon oxynitride (SiON:H,OH), and spin-on-glass (SOG) thin films are a few applications. Due to the nature of the technique, FTIR instrumentation is one of the most extensively computer-dependent pieces of equipment that is likely to be found in a microelectronics plant. In the role of fab monitor or reactor characterization tool, FTIR instruments can rapidly generate large amounts of data. By linking a local FTIR data station to a remote minicomputer its capabilities are greatly improved. We discuss three caused of enhancement. First, the FTIR in the fab area communicates and interacts in real time with the minicomputer: transferring data segments to it, instructing it to perform sophisticated processing, and returning the result to the operator in the fab. Characterizations of PSG thin films by this approach are discussed. Second, the spectra of large numbers of samples are processed locally. The large database is then transmitted to the minicomputer for study by statistical/graphics software. Results of CVD-reactor spatial profiling experiments for plasma SiON are presented. Third, processing of calibration spectra is performedmore » on the minicomputer to optimize the accuracy and precision of a Partial Least Squares'' analysis mode. This model is then transferred to the data station in the fab. The analysis of BPSG thin films is discussed in this regard. The prospects for fully automated at-line monitoring and for real-time, in-situ monitoring will be discussed. 10 refs., 4 figs.« less