Old Web
English
Sign In
Acemap
>
Paper
>
Semiconductor substrate holder with movable plate for the chemical mechanical polishing method
Semiconductor substrate holder with movable plate for the chemical mechanical polishing method
2001
Mark Hollatz
Peter Lahnor
Keywords:
Composite material
Substrate (electronics)
Chemical-mechanical planarization
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]