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X-ray scattering study of crystallization of magnetron sputtered TiO2 thin films
X-ray scattering study of crystallization of magnetron sputtered TiO2 thin films
2006
R. Kužel
L. Nichtová
D. Herman
J. Musil
Keywords:
Sputter deposition
Crystallization
Crystallography
Thin film
Scattering
High-power impulse magnetron sputtering
Cavity magnetron
X-ray
Chemistry
Analytical chemistry
Correction
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