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Laser lift-off of AlGaN on AlN grown on a sapphire substrate
Laser lift-off of AlGaN on AlN grown on a sapphire substrate
2021
Moe Shimokawa
Sho Iwayama
Kanako Shojiki
Tomoya Omori
Akihiro Yamaguchi
Motoaki Iwaya
Tetsuya Takeuchi
Satoshi Kamiyama
Hideto Miyake
Keywords:
Lift (force)
Laser
sapphire substrate
Materials science
Semiconductor
Optoelectronics
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