Vacuum-Arc Systems for Depositing 'Drop-Free' Coatings onto Inner Surfaces

Two variants of vacuum-arc sources with a consumable cathode, where the axial-to-radial plasma flow transformation is effected by the magnetoelectric system with plasma leaving through an annular magnetic slit (region with a minimum longitudinal magnetic field), are considered. Experimental diagrams of deposition rate distribution for these devices are given. It is shown that the proposed plasma transformation systems can be used for solving the problem of depositing drop-free coatings by the cathodic-arc method onto inner surfaces of hollow items (tube pieces, rings, etc.).