A High Efficient Reflector Utilized by a Subwavelength Multi-Subpart Profile Grating Structure

本文中，基于单层多齿光栅结构，我们设计、优化了一种高性能的谐振光栅反射镜。严格耦合波分析算法表明，对于TE偏振光，此结构在1.47~2.1 μm宽谱范围内，其0级反射率大于98.5% (R0 > 98.5%)，在中心波长1.8 μm处，角度带宽约为28˚。另外，我们还分析了此器件的工艺容差性能。 In this study, a high efficient reflector constructed by only a single layer subwavelength grating with multi-subpart profiles is addressed. The properties of the grating reflector are investigated by rigorous coupled-wave analysis. It is shown that for transverse electric (TE) polarized wave, over a broadband spectrum of 1.47 - 2.1 μm, the reflector demonstrates high reflectivity (R0 > 98.5%) and wide angular bandwidth (about 28˚) at 1.8 μm. Effects of deviation from the design parameters on the reflection spectra are also presented.