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Real-time prediction of interstitial oxygen concentration in Czochralski silicon using machine learning
Real-time prediction of interstitial oxygen concentration in Czochralski silicon using machine learning
2020
Kentaro Kutsukake
Yuta Nagai
Tomoyuki Horikawa
Hironori Banba
Keywords:
Biological system
real time prediction
Limiting oxygen concentration
Silicon
Materials science
Correction
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