Optical Intensity Far-Field Distribution of MEMS Micro-mirror Arrays by Fraunhofer Diffraction

MEMS mirror arrays perform superior than MEMS mirror to assemble a Lidar, but few published papers about the optical intensity and distributions when laser diffracted by MEMS arrays are available, this letter focuses on the issue. Firstly, the complex amplitudes of laser which is diffracted by 1-D (Dimension) and 2-D arrays are presented, respectively. Then we give the optical intensity and distributions on the observation plane. Finally, the simulation diagrams of these distributions are shown, and the correctness of the results is verified by Lumerical FDTD Solutions simulations and Young's double-slit experiment.