High quality factor chalcogenide microresonators with low parametric oscillation threshold

Pingyang Zeng,Wu Jiayue,Di Xia,Zelin Yang,Yaodong Sun,Yufei Huang,Jiaxing Zhao,Huanjie Cheng,Bin Zhang,Zhaohui Li

High quality factor chalcogenide microresonators with low parametric oscillation threshold

2021

Pingyang Zeng
Wu Jiayue
Di Xia
Zelin Yang
Yaodong Sun
Yufei Huang
Jiaxing Zhao
Huanjie Cheng
Bin Zhang
Zhaohui Li

We demonstrated high-quality-factor (Q) chalcogenide (Ge-Sb-S) microresonators with intrinsic Q of 1.9×106 through an improved fabrication process, which enables a low optical parametric oscillation (OPO) threshold of 3.5 mW.

Keywords:

Materials science
Electron-beam lithography
Chalcogenide
Fabrication
Refractive index
parametric oscillation
Optoelectronics
Thin film
quality

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