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PZT-actuated reliable RF-MEMS switch using single-crystal silicon asymmetric beam
PZT-actuated reliable RF-MEMS switch using single-crystal silicon asymmetric beam
2011
Nakatani
Katsuki
Okuda
Toyoda
Ueda
Nakazawa
Keywords:
Actuator
Reliability (semiconductor)
Beam (structure)
Optoelectronics
Microelectromechanical systems
Radio frequency
Contact resistance
Mobile telephony
Electrode
Materials science
Correction
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