Trace helium, neon and hydrogen gas analysis method and device

The invention provides a trace helium, neon and hydrogen gas analysis method and device, belonging to the field of separation and detection of helium, neon and hydrogen in natural gas. The method comprises the following steps: firstly carrying out a first separation on a mixed gas sample, separating helium, neon and hydrogen gases from other heavy gas components, then carrying out a second separation on the mixed gas sample without the other heavy gas components, separating helium, neon and hydrogen gases out respectively, and finally inputting the helium, neon and hydrogen one by one in a high-sensitivity gas chromatograph thermal conductivity detector for detection, and venting the separated heavy gas components by back flushing while conducting the detection. The device of the invention adopts a double-column series structure, and simultaneously optimizes chromatographic column packing materials and chromatographic analysis conditions. According to the invention, the effective separation and detection of trace helium, neon and hydrogen are realized, the analysis time is shortened, the analytical chromatographic columns are protected, and the service life of the chromatographic column is prolonged. The method can be continuously applied for trace helium, neon and hydrogen analysis of mass samples.