Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip

Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35/spl mu/m 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is /spl les/1.6mV, the resolution of the 12b ADC.