ITO glass polishing using carbon dioxide snow jet technique for organic light-emitting diodes

Surface roughness of indium-tin-oxide (ITO) film plays a crucial role on the performance of organic lighting emitting devices (OLEDs). A set of polishing apparatus with carbon dioxide snow jet as an actuating medium is established, and the surface polishing of ITO glass are carried out by this equipment. The surface morphology of ITO film is measured by using an atomic force microscope (AFM) before and after polishing treatment. The results show that before polishing, the mean values of Ra, Rpv and the RMS of the ITO surface are 1.463, 46.87 and 2.726 nm, respectively. After polishing, the value decreases to 0.773 nm, 19.51 and 1.078nm. It indicates that the polishing method is effective to reduce the ITO surface roughness. Another merit of this polishing method is that the polishing process has a cleaning effect to the ITO glass surface The performance of OLED can be enhanced and the production cost of device can be reduced.