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Deep, vertical etching of hi-silica films for optical waveguide applications
Deep, vertical etching of hi-silica films for optical waveguide applications
1997
A.J. McLaughlin
J.R. Bonar
M.G. Jubber
Paulo Marques
S.E. Hicks
C. D. W. Wilkinson
J. S. Aitchison
Keywords:
Optics
Physics
Dry etching
Optoelectronics
Waveguide (optics)
Silicon photonics
Optical fiber
Microstructured optical fiber
Hard-clad silica optical fiber
Microphotonics
Slot-waveguide
Photonic-crystal fiber
Correction
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