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Sub-quarter-micron dual gate CMOSFETs with ultra-thin gate oxide of 2nm
Sub-quarter-micron dual gate CMOSFETs with ultra-thin gate oxide of 2nm
1996
T. Kuroi
S. Shimizu
S. Ogino
Akinobu Teramoto
Masayoshi Shirahata
Y. Okumura
Masahide Inuishi
H. Miyoshi
Keywords:
Gate oxide
Micrometre
Metal gate
Electronic engineering
Materials science
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