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Step motion mediated morphology evolution of patterned vicinal Si(111) surface during high temperature annealing
Step motion mediated morphology evolution of patterned vicinal Si(111) surface during high temperature annealing
2004
H.C. Kan
Taesoon Kwon
Raymond J. Phaneuf
Keywords:
Annealing (metallurgy)
Chemical physics
Morphology (linguistics)
Vicinal
Materials science
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