Process development for MCCE textured solar cells on multicrystalline DWS wafer

In this work we report on process development for Al-BSF and PERC solar cells applying a texturing approach for an inline equipment based on Metal Catalyst Chemical Etching (MCCE). The texturing process can be varied in a wide parameter range resulting in average reflectivity in the range of 12% up to 25%. PERC solar cells were processed on DWS multicrystalline wafers in an industrial production line at Solartech with average efficiencies of 20.23% and peak efficiencies of 20.6%. The PERC solar cells demonstrated an increase of >0.6%abs. compared to solar cells textured with additives. An optimization of the front surface has been carried out on MCCE textured wafer with varying reflectivity by applying different POCl 3 diffusions as well as including PSG as passivation layer.