Probe card, wafer testing system and wafer testing method

2015 
The invention discloses a probe card, a wafer testing system and a wafer testing method. The wafer testing system comprises a wafer base and the probe card, wherein a wafer is placed on the wafer base, a plurality of test pads are formed on the wafer, and the test pads are arranged along a straight test line. The probe card comprises a plurality of probes, wherein each probe comprises a probe arm portion and a probe tip portion, an included angle between the extension of a projection line of the probe arm portion on the wafer and the straight test line ranges from about 40 to about 55 degrees, and the probe tip portion is connected to the probe arm portion so as to be in contact with the wafer.
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