Capacitive electro-mechanical transducer and its manufacturing method

A method of fabricating a capacitive electro-mechanical transducer, comprising: forming a sacrificial layer for forming a plurality of cavities (107) and a communicating portion (108) between the cavities on a substrate; forming a membrane layer (109) on the sacrificial layer; forming an etching hole (111) for exposing a portion of the sacrificial layer to outside in at least a portion of walls forming the cavities; etching the sacrificial layer through the etching hole to form the cavities and the communicating portion for communicating the cavities with each other; closing the etching hole to seal the cavities from outside; and closing at least a portion of the communicating portion to interrupt the communication between the cavities through the communicating portion.