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Development and characterization of vertical double-gate MOS field-effect transistors
Development and characterization of vertical double-gate MOS field-effect transistors
2004
S. Trellenkamp
Keywords:
Etching (microfabrication)
Ion implantation
Field-effect transistor
Epitaxy
Semiconductor device
Optoelectronics
Materials science
Transistor
Silicon
MOSFET
Correction
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