P-259L: Late-News Poster: A 14inch Uniform AMOLED Display with Low Cost PECVD Based Microcrystalline Silicon TFT Backplanes

This paper discusses development of uniform 14.1 inch AMOLED display using PECVD based microcrystalline silicon (mc-Si) TFTs. Microcrystalline silicon was deposited using conventional 13.56 MHz Plasma Enhanced Chemical Vapor Deposition (PECVD) with novel gas precursors. The mc-Si TFT's show a field effect mobility of around 1cm2/V.s and off-current less than 1pA. Electrical stress on mc-Si TFTs for a long time shows no significant threshold voltage shift indicating a stable TFT backplane. Significant uniformity improvements were made with novel TFT structure to give uniform AMOLED display. The deposition time for mc-Si TFTs was significantly reduced by using a thin mc-Si layer. Mc-Si TFT backplanes using conventional PECVD equipment offers significant cost advantages over other competing laser and non-laser polysilicon TFT technologies for AMOLEDs.