Numerical study of bulk acoustofluidic devices driven by thin-film transducers and whole-system resonance modesa)

In bulk acoustofluidic devices, acoustic resonance modes for fluid and microparticle handling are traditionally excited by bulk piezoelectric (PZE) transducers. In this work, it is demonstrated by numerical simulations in three dimensions that integrated PZE thin-film transducers, constituting less than 0.1% of the bulk device, work equally well. The simulations are performed using a well-tested and experimentally validated numerical model. A water-filled straight channel embedded in a mm-sized bulk glass chip with a 1- μm-thick thin-film transducer made of Al0.6Sc0.4N is presented as a proof-of-concept example. The acoustic energy, radiation force, and microparticle focusing times are computed and shown to be comparable to those of a conventional bulk silicon-glass device actuated by a bulk lead-zirconate-titanate transducer. The ability of thin-film transducers to create the desired acoustofluidic effects in bulk acoustofluidic devices relies on three physical aspects: the in-plane-expansion of the thin-film transducer under the applied orthogonal electric field, the acoustic whole-system resonance of the device, and the high Q-factor of the elastic solid, constituting the bulk part of the device. Consequently, the thin-film device is remarkably insensitive to the Q-factor and resonance properties of the thin-film transducer.