Structure and Some Electrical Properties of Amorphous Diamond-like Carbon Filmsfn1

Abstract Diamond-like carbon (DLC) layers deposited at room temperature in 27.12 MHz radiofrequency methane plasma have been studied. The results of structural identification and roughness characterization of the DLC films are reported. AFM images and Raman spectra analysis of investigated samples revealed that, in the RF PCVD technique, amorphous hard carbon film are produced. Trap levels in DLC films are investigated by using the thermally stimulated current (TSC) technique. The open-circuit technique was applied for the drift mobility measurements. Thermally activated hopping is a predominant mechanism of charge carrier transport in the considered range of temperature for amorphous diamond-like carbon films.