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Local laser annealing of 3C-SiC film deposited on the silicon substrate by CVD
Local laser annealing of 3C-SiC film deposited on the silicon substrate by CVD
2019
A. V. Avramchuk
I. V. Komissarov
M. M. Mikhalik
V. Yu. Fominski
R. I. Romanov
A O Sultanov
N. V. Siglovaya
S. M. Ryndya
A. S. Gusev
V. A. Labunov
N. I. Kargin
Keywords:
Optoelectronics
Annealing (metallurgy)
Substrate (chemistry)
Laser
Silicon
Materials science
laser annealing
Correction
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