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The IMEC Clean: implementation in advanced CMOS manufacturing
The IMEC Clean: implementation in advanced CMOS manufacturing
2000
Marc Meuris
Sophia Arnauts
Ingrid Cornelissen
Karine Kenis
Marcel Lux
Stefan De Gendt
Paul Mertens
Ivo Teerlinck
Rita Vos
Lee M. Loewenstein
Marc Heyns
Keywords:
Computer engineering
CMOS
Manufacturing engineering
Engineering
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