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Dopant Transport in Tungsten Silicide Buried Layers for Application in SSOI
Dopant Transport in Tungsten Silicide Buried Layers for Application in SSOI
2010
S. Liao
Michael Bain
Paul Baine
John Montgomery
David McNeill
B.M. Armstrong
Harold Gamble
Keywords:
Tungsten
Dopant
Silicide
Ceramic materials
Metallurgy
Materials science
Optoelectronics
Correction
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