Research And Development on MEMS Based Electric Field Sensor

Electric field sensors are widely used in many fields. MEMS based electric field sensor has the advantages of small size, light weight and low power consumption. It can not only be used to upgrade the traditional electric field detection equipment, but also meet the needs for a lot of new applications. This presentation will review briefly the research and development of MEMS based electric field sensors, report the work and progress of the author's team, provide examples of practical applications, prospect for the future work and potential new applications, and discuss about the difficulties and problems.