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Gas-phase photochemical doping of amorphous silicon
Gas-phase photochemical doping of amorphous silicon
1984
R. Bilenchi
A. Ferrario
M. Musci
Keywords:
Amorphous silicon
Amorphous carbon
Doping
Physics
Photochemistry
Nanocrystalline silicon
Optoelectronics
gas phase
Correction
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