Modeling and simulation of nichrome microheater on polycarbonate substrate

This paper presents the design and simulation of four different structures of nichrome microheater on the polycarbonate substrate. Nichrome layer is covered by the silicon nitride dielectric layer. The comb capacitor covering dielectric layer is used for measuring electrical parameters of liquids. Designed structure allows impedance, resistance and capacitance monitoring of studied substances like chemical or biological liquids, which require constant heating value on the substrate surface. 3D model design and electro-thermal finite elements simulations were carried out by CoventorWare software. Various shapes of the heaters were studied to check the uniformity heating on the active surface.