Stage apparatus, lithography apparatus, method of manufacturing an article, and determination method

The invention relates to a stage apparatus, a lithography apparatus, a method of manufacturing an article, and a determination method. The present invention provides the stage apparatus including a stage being movable, comprising a driving unit configured to drive the stage by providing thrust to the stage, a measuring unit configured to measure a position of the stage, and a control unit configured to control the position of the stage by supplying, to the driving unit, a signal composed of a first signal for reducing a deviation between a current position of the stage and a target position, and a second signal for reducing vibration of the stage caused by a thrust ripple included in the thrust.