Thermochromic VO2 thin films on ITO-coated glass substrates for broadband high absorption at infra-red frequencies

Thin films of vanadium dioxide (VO2) are deposited on indium tin oxide (ITO), stainless steel (SS), and glass substrates using chemical vapour deposition. X-ray diffraction and Raman spectroscopy measurements confirmed the single phase nature of the VO2, which showed a phase transition from a low conducting state at low temperature( 68 °C). This was confirmed by electrical conductance and infra-red reflectance measurements. X-ray photoelectron spectroscopy was used to measure the charge states of vanadium species. The optical constants of VO2 were determined using visible and near-infra red(NIR) reflectivity and show that the VO2 film on ITO has a lowered plasma frequency compared with VO2 on glass substrates. The thin films of VO2 enable a broadband of ultra-high absorption at mid-wave infra-red frequencies due to a Fabry-Perot (F-P) like resonance due to the dielectric properties of ITO, SS, or glass. The tunability of this absorption band via VO2 ...