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Compressible squeeze-films in vibrating MEMS structures at high frequencies
Compressible squeeze-films in vibrating MEMS structures at high frequencies
2009
Veijola
Keywords:
Knudsen number
Microelectromechanical systems
Reynolds equation
Compressibility
Mechanics
Knudsen flow
Finite element method
Shock absorber
Topology (chemistry)
Physics
Correction
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