Structural analyses of Cu-doped CeO2 thin films deposited by means of laser ablation

Abstract The structural analysis of thin cerium dioxides films doped with Cu, elaorated by the laser ablation technique for catalytic and gas sensor application, was the general aim of this study. The influence of process parameters (substrate temperature, time, and volume fraction of Cu) on the thin film morphology has been investigated. The volume fraction of Cu changed in the range 2–7.5 wt.%. The thin films were characterised by scanning electron microscopy (SEM) and X-ray diffraction (XRD) analyses.