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Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure
Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure
2016
Harada Taisei
Gakiya Futa
Ashitomi Takuya
Okada Tatsuya
Noguchi Takashi
Noda Kanji
Suwa Akira
Ikenoue Hiroshi
Okuyama Tetsuo
Keywords:
Thin-film transistor
Electronic engineering
Metal
Materials science
Optoelectronics
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