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Silicon Dry Etching Process for High Topography Sub-micro and Nano-devices
Silicon Dry Etching Process for High Topography Sub-micro and Nano-devices
2008
Anothony De Luca
Frederic Ritton
Marc Gelly
Julien Buckley
Michel Heitzman
Keywords:
Dry etching
Etching (microfabrication)
Nano-
Reactive-ion etching
Composite material
Materials science
Silicon
Optoelectronics
nano devices
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